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Brown, A, O'Neill, G and Blackstone, S (2003) Single-crystal micromachining using multiple fusion-bonded layers. In: Micromachining and Microfabrication Process Technology VI, Santa Clara. UNSPECIFIED. 10 pp. [Conference contribution]
![[img]](/style/images/fileicons/application_pdf.png) | PDF - Accepted Version Indefinitely restricted to Repository staff only. 172Kb |
URL: http://dx.doi.org/10.1117/12.396460
Abstract
Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers
| Item Type: | Conference contribution (Paper) |
|---|---|
| Faculties and Schools: | Faculty of Computing & Engineering Faculty of Computing & Engineering > School of Engineering |
| Research Institutes and Groups: | Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC) |
| ID Code: | 6693 |
| Deposited By: | Dr Alan Brown |
| Deposited On: | 20 Jan 2010 09:15 |
| Last Modified: | 18 Aug 2011 11:08 |
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