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The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

McCann, R, Roy, SS, Papakonstantinou, P, Abbas, GA and McLaughlin, JAD (2005) The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films. DIAMOND AND RELATED MATERIALS, 14 (3-7, Sp. Iss. SI). pp. 983-988. [Journal article]

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URL: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TWV-4FPX2KX-1-2&_cdi=5572&_user=126978&_orig=search&_coverDate=07%2F31%2F2005&_sk=999859996&view=c&wchp=dGLbVzb-zSkWA&md5=62f3f3d7fc3f9e5007f3311e57eef361&ie=/sdarticle.pdf

DOI: 10.1016/j.diamond.2004.12.037


Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.

Item Type:Journal article
Keywords:tetrahedral carbon; thickness; XRR; vibrational spectroscopies
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:285
Deposited By:Mrs Ann Blair
Deposited On:19 Oct 2009 13:15
Last Modified:07 Apr 2014 14:51

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