McCann, R, Roy, SS, Papakonstantinou, P, Abbas, GA and McLaughlin, JAD (2005) The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films. DIAMOND AND RELATED MATERIALS, 14 (3-7, Sp. Iss. SI). pp. 983-988. [Journal article]
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Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.
|Item Type:||Journal article|
|Keywords:||tetrahedral carbon; thickness; XRR; vibrational spectroscopies|
|Faculties and Schools:||Faculty of Computing & Engineering|
Faculty of Computing & Engineering > School of Engineering
|Research Institutes and Groups:||Engineering Research Institute|
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
|Deposited By:||Mrs Ann Blair|
|Deposited On:||19 Oct 2009 13:15|
|Last Modified:||21 Feb 2014 14:24|
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