Ulster University Logo

Ulster Institutional Repository

Electronic structure and photoluminescence study of silicon doped diamond like carbon (Si : DLC) thin films

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

Ray, SC, Okpalugo, TIT, Pao, CW, Tsai, HM, Chiou, JW, Jan, JC, Pong, WF, Papakonstantinou, P, McLaughlin, JAD and Wang, WJ (2005) Electronic structure and photoluminescence study of silicon doped diamond like carbon (Si : DLC) thin films. MATERIALS RESEARCH BULLETIN, 40 (10). pp. 1757-1764. [Journal article]

[img]PDF - Published Version
Indefinitely restricted to Repository staff only.

302Kb

URL: http://www.sciencedirect.com/science/article/pii/S0025540805001960

DOI: 10.1016/j.materresbull.2005.05.009

Abstract

We have investigated the electronic and bonding structure using Fourier-transform infra-red (FT-IR) spectra and studied photoluminescence (PL) from micro-Raman spectra analysis of a-C:H:Si (Si:DLC) thin films deposited by plasma enhanced chemical vapour deposition (PECVD) method. Tetramethylsilane [Si(CH3)(4), TMS] vapour was used as Silicon precursor and a bias voltage of 400 V was applied during deposition. It is observed from FT-IR spectra that with increasing TMS flow rate, the intensity of Si-H-n and C-H-n modes is increased significantly. PL study indicates that the PL is increased and that the PL peak position is shifted towards lower energy when the TMS flow rate increases gradually during deposition. (C) 2005 Elsevier Ltd. All rights reserved.

Item Type:Journal article
Keywords:thin film; vapour deposition; infrared spectroscopy; luminescence
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:283
Deposited By:Mrs Ann Blair
Deposited On:19 Oct 2009 13:12
Last Modified:11 Oct 2013 09:34

Repository Staff Only: item control page