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Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

Brosnihan, TJ, Brown, A, Brogan, A, Gormley, CS, Collins, DJ, Sherman, SJ, Lemkin, M, Polce, NA and Davis, MS (2003) Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics. In: BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2. UNSPECIFIED. 5 pp. [Conference contribution]

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Abstract

The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.

Item Type:Conference contribution (Poster)
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:2106
Deposited By:Dr Alan Brown
Deposited On:27 Nov 2009 13:56
Last Modified:18 Aug 2011 11:08

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