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Lemoine, P and McLaughlin, JAD (1997) Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. In: ELECTRON MICROSCOPY AND ANALYSIS 1997. IOP PUBLISHING LTD. (153) 4 pp. [Conference contribution]
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Abstract
The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.
| Item Type: | Conference contribution (Paper) |
|---|---|
| Faculties and Schools: | Faculty of Computing & Engineering Faculty of Computing & Engineering > School of Engineering |
| Research Institutes and Groups: | Engineering Research Institute Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC) |
| ID Code: | 18928 |
| Deposited By: | Mrs Ann Blair |
| Deposited On: | 19 Jul 2011 09:02 |
| Last Modified: | 19 Jul 2011 09:02 |
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