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Monitoring laser-induced microstructural changes of thin film hydrogenated amorphous carbon (a-C : H) using Raman spectroscopy

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

Lamberton, RW, Morley, SM, Maguire, PD and McLaughlin, JAD (1998) Monitoring laser-induced microstructural changes of thin film hydrogenated amorphous carbon (a-C : H) using Raman spectroscopy. THIN SOLID FILMS, 333 (1-2). pp. 114-125. [Journal article]

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Abstract

Thin films (10 - 150 nm) of a-C:H on glass and silicon substrates have been studied utilizing a confocal micro Raman system using an argon ion laser (514.5 nm) and helium-neon (He-Ne) laser (637.8 nm) for sample excitation. The relationship between the measured Raman spectrum and the film thickness, substrate material, laser intensity and exposure time, have been assessed. From this, the dominant variables have been identified. Microstructural changes in the form of the growth of graphitic crystallites, similar to that of thermally annealed samples, have been observed. For longer laser irradiation exposure times this graphitic component decreases, revealing an amorphous carbon structure, possibly containing some tt tetrahedrally-bonded carbon. Optical microscopy and topographical atomic force microscopy also highlight the range of laser ablated conditions that result. (C) 1998 Elsevier Science S.A. All rights reserved.

Item Type:Journal article
Keywords:diamond-like carbon; hydrogenated amorphous carbon (a-C : H); laser irradiation; Raman scattering
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:18925
Deposited By:Mrs Ann Blair
Deposited On:19 Jul 2011 09:00
Last Modified:19 Jul 2011 09:00

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