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Characterisation of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

Ogwu, AA, Lamberton, RW, Morley, S, Maguire, PD and McLaughlin, JAD (1999) Characterisation of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy. PHYSICA B, 269 (3-4). pp. 335-344. [Journal article]

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Abstract

Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time. (C) 1999 Elsevier Science B.V. All rights reserved.

Item Type:Journal article
Keywords:diamond like carbon; Raman spectroscopy; thermal annealing
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:18918
Deposited By:Mrs Ann Blair
Deposited On:19 Jul 2011 08:56
Last Modified:19 Jul 2011 08:56

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