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Application of Non-Eqilibrium Plasmas in Top-Down and Bottom-Up Nanotechnologies and Biomedicine

Biomedical Sciences Research Institute Computer Science Research Institute Environmental Sciences Research Institute Nanotechnology & Advanced Materials Research Institute

Petrovic, ZL, Radmilovic-Radjenovic, M, Maguire, PD, Radetic, M, Puac, N, Maric, D, Radjenovic, B and Malovic, G (2010) Application of Non-Eqilibrium Plasmas in Top-Down and Bottom-Up Nanotechnologies and Biomedicine. In: 27th International Conference on Microelectronics , Nis, Serbia. IEEE. 8 pp. [Conference contribution]

PDF (Conference proceedings - 8 pages) - Published Version

URL: http://ieeexplore.ieee.org/xpl/conferences.jsp


In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.

Item Type:Conference contribution (Keynote)
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:14052
Deposited By:Professor Paul Maguire
Deposited On:07 Jun 2010 15:33
Last Modified:18 Aug 2011 11:49

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