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Ray, SC, Bao, CW, Tsai, HM, Chiou, JW, Jan, JC, Kumar, KPK, Pong, WF, Tsai, MH, Wang, WJ, Hsu, CJ, Okpalugo, TIT, Papakonstantinou, P and McLaughlin, JAD (2004) Electronic structure and bonding properties of Si-doped hydrogenated amorphous carbon films. Applied Physics Letters, 85 (18). pp. 4022-4024. [Journal article]
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URL: http://dx.doi.org/10.1063/1.1812594
Abstract
This work investigates the C K-edge x-ray absorption near-edge structure (XANES), valence-band photoelectron spectroscopy (PES), and Fourier transform infrared (FTIR) spectra of Si-doped hydrogenated amorphous carbon films. The C K-edge XANES and valence-band PES spectra indicate that the sp2/sp3 population ratio decreases as the amount of tetramethylsilane vapor precursor increases during deposition, which suggest that Si doping% enhances sp3 and reduces sp2-bonding configurations. FTIR spectra show the formation of a polymeric sp3 C-Hn structure and Si-Hn bonds, which causes the Young's modulus and hardness of the films to decrease with the increase of the Si content. Copyright American Institute of Physics 2004
| Item Type: | Journal article |
|---|---|
| Keywords: | diamond-like carbon, hydrogen, silicon, thin films, amorphous state, XANES, valence bands, Young's modulus, hardness, impurity distribution, infrared spectra, Fourier transform spectra, photoelectron spectroscopy |
| Faculties and Schools: | Faculty of Computing & Engineering Faculty of Computing & Engineering > School of Engineering |
| Research Institutes and Groups: | Engineering Research Institute Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC) |
| ID Code: | 1249 |
| Deposited By: | Mrs Ann Blair |
| Deposited On: | 27 Nov 2009 13:53 |
| Last Modified: | 15 Jun 2011 10:51 |
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